Mask Specification> Order Information > Complete Order
Please provide the following details to help understand your specific needs.
1X MasterThis mask is used on a contact print or projection aligner and is at a scale of 1X.
1X Master with CopiesWe look after your master and make contact prints from it.The copy does not have as high a specification as a master but may be adequate for your process.
It is also useful if your mask needs to be replaced due to frequent use. Copies cost less and are a mirror image of the master mask, since they are produced from a contact print process.
Reticlehis mask is used on a Direct Step onto Wafer aligner and is scaled at either 1X, 2X, 2.5X,4X, 5X or 10X - Compugraphics offer a full range of reduction reticles for all major stepper systems. Contact us to arrange a reticle quotation.
1X Master with CoatingThis mask is used on a contact print or projection aligner and is at a scale of 1X.
MPT™ is an optically transparent fluoropolymer mask protection agent applied to chrome side of the mask. It helps reduce defects on wafers by providing a release [anti-sticktion] layer that significantly minimizes adhesion of resist onto the mask.
Please note that the last figure is the mask thickness.
NB. maximum write area 1cm less than mask size.
Quartz is more expensive, but expands less if the mask gets warm during use and is also transparent at deeper Ultraviolet (DUV) wavelengths, where Soda Lime glass is opaque.
Quartz needs to be used where the wavelength being used to expose the mask is less than or equal to 365nm (i-line).
For certain copy sizes we can also provide Iron Oxide film, instead of the normal chrome.
This may not be the smallest feature in your design, but it is the smallest one that must appear on the mask.
Please note that the smallest feature size that we guarantee to resolve through our copy process is 2µ If you have resolution type features smaller than the critical feature size, please make us aware of these.
The maximum allowable deviation on the mask of the size of the minimum critical feature. Our standard is 0.25µ. If you require a different one, please select.
A defect is any instance where the completed mask does not match the data that was used to write the mask. Our standard defectivity is 0.2 per sq. cm @ 1µ
Strip & ShipWhere defectivity is non-critical, the mask can be given a visual inspection under a bright monochromatic light.
The mask will be despatched to the customer if there are no defects large enough to be spotted by the human eye.
There is no automatic inspection or microscopes used to check the defectivity, as a result such masks are cheaper.
The Strip & Ship option provides a cost effective method of prototyping where a high yield is of less importance.
The size of defect that will affect the functioning of the design.
The placement accuracy of the patterned features on the mask from one side of the mask to the opposite side Registration is guaranteed from writing tool by SPC.
We can look after your master and make contact prints from it.
The copy does not have as high a specification as a master but may be adequate for your process. It is also useful if your mask needs to be replaced due to frequent use.
Copies cost less and are a mirror image of the master mask, since they are produced from a contact print process.
The maximum allowable deviation on the mask of the size of the minimum critical feature. Our standard is 0.5µ. If you require a different one, please select.
GDS or OASIS is our preferred data format.
The complexity of a design can greatly affect the Print time for a mask (directly affecting the costs). Designs containing large numbers of circles or non 45 degree shapes will also have a negative impact on the Print time. If your mask can function with the circles drawn as octagons, this would help reduce costs.
We recommend that no features should be within 10 mm from either edge of the mask.
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