What is registration on a photomask?
Registration is the placement accuracy of the patterned features on the mask from one side of the mask to the opposite side. Registration is guaranteed from our writing tool by SPC. The specification varies by material and writing tool. Based on SPC information, masks without a registration check will conform to the following registration specification.
- Alta QZ +/- 0.10 um
- Core QZ +/- 0.15 um
- Soda Lime masks +/- 0.40 um
Although SL masks can be exposed with a tight registration, any temperature variation when the mask is used will have a more significant effect. Fab temperature alignment should be discussed with customer support as this varies according to mask size.
