Difference between Quartz and Soda Lime Glass?

Mask Materials

The most common types of glass for manufacturing masks are Quartz and Soda Lime.

Quartz is more expensive, but has the advantage of a much lower coefficient of Thermal Expansion (which means it expands less if the mask gets warm during use) and is also transparent at deeper Ultraviolet (DUV) wavelengths, where Soda Lime glass is opaque.

Quartz needs to be used where the wavelength being used to expose the mask is less than or equal to 365nm (i-line).

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