What is the smallest feature size possible?
The minimum feature, which can be resolved on a mask, depends on the technology of the writing tool and the mode in which the tool is used, as well as the resist and process chemistry used.
Note that MEBES 5500 photomasks are only available in 6″x6″x250 materials with a dry etch process. (We don’t even have the MEBES 5500 any longer in US or UK) This makes these photomasks are the more expensive option. Smaller contacts (features) can be manufactured on the 5500 system using Phase Shift Masks, also a more expensive option than using normal Chrome masks.